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There are five different terms. In the increasing order:

Ваше Преподобие (диакон, иерей, иеромонах)
Ваше Высокопреподобие (архидиакон, протодиакон, протоиерей, архимандрит, схиархимандрит)
Ваше...

Ваша Светлость -- to the lesser or distant relatives of the royal family; to "светлейший князь" -- a special "duke with distinction" title, normally granted for a very remarkable accomplishment, to...